Author Affiliations
Abstract
1 National Laboratory of Solid State Microstructures, College of Engineering and Applied Science and School of Physics, Nanjing University, Nanjing 210093, China
2 Department of Physics, University of Arkansas, Fayetteville, Arkansas 72701, USA
We demonstrate the fabrication of ultrahigh quality (Q) factor silica microdisk resonators on a silicon chip by inductively coupled plasma (ICP) etching. We achieve a dry-etched optical microresonator with an intrinsic Q factor as high as from a 1-mm-diameter silica microdisk with a thickness of 4 μm. Our work provides a chip-based microresonator platform operating in the ultrahigh-Q region that will be useful in nonlinear photonics such as Brillouin lasers and Kerr microcombs.
Photonics Research
2021, 9(5): 05000722
Author Affiliations
Abstract
1 National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences,Nanjing University, Nanjing 210093, China
2 Department of Physics, University of Arkansas, Fayetteville, Arkansas 72701, USA
We experimentally demonstrate high optical quality factor silica microdisk resonators on a silicon chip with large wedge angles by reactive ion etching. For 2-μm-thick microresonators, we have achieved wedge angles of 59°, 63°, 70°, and 79° with optical quality factors of 2.4 × 107, 8.1 × 106, 5.9 × 106, and 7.4 × 106, respectively, from ～80 μmdiameter microresonators in the 1550 nm wavelength band. Also, for 1-μm-thick microresonators, we have obtained an optical quality factor of 7.3 × 106 with a wedge angle of 74°.
Optical resonators Optical resonators Microcavity devices Microcavity devices Photonics Research
2015, 3(5): 05000279
